Abstract
As a key indicator reflecting the working accuracy of rotary functional units, the error motions of the precision shafting are very necessary to be measured. In this paper, the main error sources for the error motion measurement of a precision shafting using a T-type capacitive sensor were investigated. The theoretical modeling error due to the approximate simplification for the output capacitance expressions was firstly analyzed. By means of the 3D-FEA method, the influence of fringe effects was subsequently investigated. Finally, the analysis of electrode installation errors was emphasized on the tilt error of the cylindrical electrode and coaxiality error of the fan-shaped electrode by establishing mathematical models and numerical simulation. Based on the theoretical analysis and simulation results, the methods of decreasing the approximate error and the nonlinear error caused by fringe effects were subsequently proposed; for the installation errors, the tilt error of cylindrical electrode only makes the solution of phase angle have a certain deviation and has almost no effect on solving the radial displacement, especially for the measurement range less than 0.1 mm; the measurement of the rotor tilt displacement was basically not affected by the coaxiality error of the fan-shaped electrode.
Highlights
The rotary functional units with precision shafting as the core are widely used in highend equipment such as high-precision CNC machine tools, EUV lithography equipment, axial compressors and small agile satellites [1–7]
Chapman et al carried out research on the measurement of rotary axis error motions using a cylindrical capacitive sensor (CCS) with multiple electrodes of large sense area [13–15]
In order to theoretically analyze the tilt error motion during the measurement, we considered tiny tilt displacement of a precision spindle and reasonable structural parameters of the sensor, that is, |kρ/a| < 1 for the parameter term kρ/a in Equation (15)
Summary
The rotary functional units with precision shafting as the core are widely used in highend equipment such as high-precision CNC machine tools, EUV lithography equipment, axial compressors and small agile satellites [1–7]. Chapman et al carried out research on the measurement of rotary axis error motions using a cylindrical capacitive sensor (CCS) with multiple electrodes of large sense area [13–15]. Both the radial electrode group (REG) and the end part electrode group (EPEG) were.
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