Abstract
Convergent-beam electron diffraction (CBED) is used to study lattice strain around plate-like oxygen precipitates in Czochralski (CZ)-grown silicon. Local lattice strain determined from higher-order Laue zone (HOLZ) patterns shows that compressive and tensile stress fields exist near the precipitates. The spatial variation of local lattice strain and lattice rotation is visualized in a defocused large angle CBED disc, or a convergent-beam imaging (CBIM) disc.
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