Abstract
Micron-scale mapping of intrinsic stress in a free-standing chemical vapor deposition diamond film was performed by analysis of splitting and shift of the Raman diamond line. Stress distribution within individual grains was observed for high quality (line width of 2.8–3.0 cm −1) 600 μm thick free-standing film grown by microwave plasma enhanced chemical vapor deposition. It has been shown that all the variety of the Raman diamond line shapes observed can be presented by a superposition of two symmetric components with narrow widths. In some cases the two components can be completely resolved in succession by polarization analysis. (110)-Oriented crystals reveal anisotropic stress fluctuations up to 9 GPa of both signs (compressive and tensile). For grain sizes of 100–200 μm high stressed regions of 200–300 μm 2 area located in the vicinity of edges and grain boundaries have been detected. Possible sources of the high stresses of both signs related to defect and impurity distributions within the grain are discussed.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
