Abstract
We investigate the relative validity of the Bruggeman effective-medium approximation and several alloy models to describe interfaces in the analysis of spectroscopic ellipsometric data of laminar samples, using data obtained on an Al x Ga 1− x As multilayer sample fabricated specifically for this purpose. The investigation highlights the types of errors that result from the use of inappropriate models. Optimum results are obtained with the alloy model where the graded-composition regions are approximated with multilayer stacks.
Full Text 
Sign-in/Register to access full text options
Sign-in/Register to access full text options 
Paper version not known
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a call
