Abstract

A thorough analysis is made of geometrical effects on the capacity and dissipation factor of gold and thermally anodized tantalum interdigitated thin film capacitors. These capacitors are realized by deposition of a thin film conductor over a substrate with a medium dielectric constant. A series of evaluation tests under several environmental conditions and for both the deposited layers is given, together with a report of the behavioural analysis of the parameters which characterize the capacitors at different working frequencies. Examples of applications at both high and low frequencies with considerations about stability for the two types of conductor materials and choice criteria are then presented for the range of values from 1 to 30 pF, which are those in practical use.

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