Abstract
A mass spectrometer for the routine analysis cannot be used directly for the analysis of high purity carbon dioxide. The method for separation of impurities is described in this paper. Impurities, such as argon, nitrogen, oxygen and so on, can be separated from carbon dioxide by using a liquid nitrogen trap and be determined down to 1-0.1 ppm order by mass spectrometer. Both of the pattern coeffcients of peaks at m/e 14 and 32 of high purity carbon dioxide are about 0.02.
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