Abstract
The possibilities of using the computer isophotometry method to estimate the image quality of high-resolution projection objectives are considered. An experimental setup for measuring the point spread function is developed. A two-mirror objective of the Schwarzschild type with a numerical aperture of 0.36 designed for the use in an experimental nanolithographer is studied. Control measurements by the computer isophotometry method show that, at a wavelength of 13.4 nm, this objective is capable of resolving image features with a size of no larger than 50 nm.
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