Abstract
The currently used bulk analysis and depth profiling methods for hydrogen in inorganic materials and inorganic coatings are reviewed. Bulk analysis of hydrogen is based on fusion of macroscopic samples in an inert gas and the detection of the thereby released gaseous H2 using inert gas fusion (IGF) and thermal desorption spectroscopy (TDS). They offer excellent accuracy and sensitivity. Depth profiling methods involve glow discharge optical emission spectroscopy and mass spectrometry (GDOES and GDMS), laser-induced breakdown spectroscopy (LIBS), secondary ion mass spectrometry (SIMS), nuclear reaction analysis (NRA), and elastic recoil detection analysis (ERDA). The principles of all these methods are explained in terms of the methodology, calibration procedures, analytical performance, and major application areas. The synergies and the complementarity of various methods of hydrogen analysis are described. The existing literature about these methods is critically evaluated, and major papers concerning each method are listed.
Highlights
The presence of hydrogen in various materials and the ways in which it affects their properties has been the subject of attention of the scientific community for decades
The aim of this review is to categorize these methods and describe their principles and analytical performance, so that the reader may understand how they work, the kind of information they can provide, and their figures of merit, as well as get an idea of how to address the specific analytical tasks related to hydrogen arising in various areas of science and technology
Cs+ sputtering and detection by H− secondary ions is recommended, while a detection limit of H in silicon of ~2 × 1018 atoms/cm3 was reported in [77], which corresponds to
Summary
The presence of hydrogen in various materials and the ways in which it affects their properties has been the subject of attention of the scientific community for decades. The analysis of hydrogen is special in many respects, and it makes sense to treat it separately from other elements. In this context, it is worth mentioning the electron structure of the hydrogen atom; hydrogen has only one electron and does not possess deep inner shells. Methods for hydrogen analysis are diverse, in every respect, and information about them is scattered through the literature, ranging from analytical chemistry to metallurgy, nuclear science, and other application areas. The aim of this review is to categorize these methods and describe their principles and analytical performance, so that the reader may understand how they work, the kind of information they can provide, and their figures of merit, as well as get an idea of how to address the specific analytical tasks related to hydrogen arising in various areas of science and technology
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