Abstract
A radiofrequency (r.f.) glow discharge ion source was coupled to a double-focusing sector field mass spectrometer with reverse Nier–Johnson geometry. The glow discharge cell powered by a 13.56 MHz generator was connected directly to the interface of the mass spectrometer. The r.f. glow discharge ion source operates optimally at an argon pressure of 2.5 hPa and radiofrequency powers of 30 W. With increasing argon pressure more complex mass spectra were observed due to the higher molecular ion formation rate. The analytical performance of r.f. glow discharge mass spectrometry was investigated for the trace elemental analysis of semi-insulating gallium arsenide crystals. Using ICP–MS after matrix separation for a better quantification of multielement determination of trace impurities, detection limits comparable to r.f. GDMS in the low ng/g concentration range are obtained.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callMore From: International Journal of Mass Spectrometry and Ion Processes
Disclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
