Abstract
A 3D force sensor is developed using bulk silicon micromachining for measuring force in the sub-μN range. It is intended for use in high precision coordinate measuring machines. Full and cross-shaped boss membranes are fabricated, where the total chip size is 6.5 × 6.5 mm2. The full membrane is 3000 × 3000 µm2 and the beams of the cross-shaped membrane are 900 × 700 µm2 with 16 p-diffused piezoresistors in transversal strain configuration. The strains detected by the piezoresistors are measures of the three orthogonal components of the force applied at the tip of the stylus, which is glued on the center of the boss. When a vertical load is applied to the stylus, higher sensitivity is obtained for the cross-shaped membrane than for the full membrane.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
