Abstract

The performance of devices fabricated from piezoelectric semiconductors, such as sensors and actuators in microelectromechanical systems, is superior; furthermore, plate structures are the core components of these smart devices. It is thus important to analyze the electromechanical coupling properties of piezoelectric semiconductor nanoplates. We established a nanoplate model for the piezoelectric semiconductor plate structure by extending the first-order shear deformation theory. The flexural vibrations of nanoplates subjected to a transversely time-harmonic force were investigated. The vibrational modes and natural frequencies were obtained by using the matrix eigenvalue solver in COMSOL Multiphysics 5.3a, and the convergence analysis was carried out to guarantee accurate results. In numerical cases, the tuning effect of the initial electron concentration on mechanics and electric properties is deeply discussed. The numerical results show that the initial electron concentration greatly affects the natural frequency and electromechanical fields of piezoelectric semiconductors, and a high initial electron concentration can reduce the electromechanical fields and the stiffness of piezoelectric semiconductors due to the electron screening effect. We analyzed the flexural vibration of typical piezoelectric semiconductor plate structures, which provide theoretical guidance for the development of new piezotronic devices.

Highlights

  • In 1960, Hutson discovered the piezoelectric effect in ZnO and CdS semiconductors [1]

  • Owing to the weak piezoelectricity of piezoelectric semiconductors (PSCs), researchers early on usually treated them as normal semiconductor materials

  • 0.4 electron concentration can reduce the stiffness of gallium nitride (GaN) PSC

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Summary

Introduction

In 1960, Hutson discovered the piezoelectric effect in ZnO and CdS semiconductors [1]. Basic problems in PSCs were found, such as electromechanical fields in fibers [9,10], near-field cracks [11,12], I–V characteristics of positive-negative carrier junctions [13,14], flexural and vibration of beams [15], thermal effects [16,17], and waves propagations [18,19] In microelectromechanical systems, such as semiconductor devices, plate structures are the important core components. Yang and Zhou [20] derived two-dimensional (2D) equations coupled extensional, flexural, and thickness-shear motions of PSC thin plates from the three-dimensional equations by power series expansions in the plate thickness coordinate They analyzed the propagation of thickness-shear waves and the amplification effect of an electric field on thickness-shear waves.

Piezoelectric Semiconductor Plate Model
Modal Analysis
Numerical Examples
Vibration Behaviors
Distributions
Effects of Initial Electron Concentration
Figures andconcentration
Electric
Conclusions
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