Abstract
Because fabrication errors have a great influence on micro-springs elastic coefficient, and it is difficult to reduce the influence through fabrication process methods at this stage, the authors propose solutions through design process to reduce the sensitivity of Elastic coefficient of fabrication errors. The authors derived error propagation formula through multivariate function Taylor series expansion method, and made a quantitative analysis of the influence of fabrication errors, then summarized the influence rules of the size parameters on dispersibility of elastic coefficient K, finally proposed the method to degrade device performance dependent on the fabrication precision.
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