Abstract
Nitrogen-doped CZ silicon crystals with different oxygen contents were studied by quantitative FTIR spectroscopy. Thermal-equilibrium annealing at 600 °C is suitable to obtain information on the chemical composition of N–O related shallow donors. All species investigated (N–O-1, N–O-2, N–O-3, and N–O-5) contain one nitrogen atom. However, different numbers of oxygen atoms are involved. N-O-5 incorporates the lowest number, probably two; N–O-3 contains one oxygen atom more, whereas N–O-1 and N–O-2 contain two more.
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