Abstract
As the size of diffracting structures with a diffractive optical elements is on the order of or less than the illumination wavelength, it is necessary to use a rigorous electromagnetic theory of diffraction to accurately analyze its performance. A rigorous electromagnetic analyse of two-dimensional diffractive microlenses is presented. Without paraxial approximation, the focusing performance of diffractive microlenses with different f-number have been determined including diffractive efficiency with different incidence polarizations (TE polarization and TM polarization), and different profile structures (continuous profile, 8-level profile and 2-level profile) of mircolenses, respectively. Both scalar and rigorous analyses are performed on all these diffractive microlenses.
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