Abstract

Ellipsometric data for several diamond-turned samples were measured at a wavelength of 5A‚µm and at multiple angles of incidence. These data were reduced by the least-square-fit programs for different models to obtain the corresponding best-fit parameters. Calculations from the three-dimensional anisotropic model for diamond-turned surfaces show that the ellipsometric parameters are not sensitive to the sample orientation for parallel depolarization factors smaller than 0.03. The best-fit results for different models are compared and discussed. A special model for two-dimensional symmetric rough layers can give rms errors as low as δψ ≤ 0.005° and δΔ ≤ 0.02°; its best-fit parameters agree with the profilometric rms roughness and rms slope.

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