Analysis of DC magnetron discharges in Ar- gas mixtures. Comparison of a collisional-radiative model with optical emission spectroscopy

Abstract

DC magnetron discharges in argon-nitrogen gas mixtures have been characterized by optical emission spectroscopy (OES). Optical lines from the cathode species (aluminium) and the gas mixture (argon, nitrogen) have been measured at constant total pressure, as a function of the gas mixture composition and electrical power. The experimental data are compared with results of a theoretical plasma model which solves self-consistently the Boltzmann equation for electrons and the kinetic equations for aluminium, argon, molecular and atomic nitrogen states. The emission intensity variations of plasma species have been analysed versus the nitrogen relative concentration and electrical power and compared with calculated populations of emitting species with a satisfactory agreement. The variation of aluminium density versus the nitrogen concentration has been deduced by using the line intensity and excitation rates given by the model.