Abstract
The metal loss of multiturn spiral inductors is known to increase dramatically under current-crowding effects at high frequencies. An equivalent circuit is derived to simulate this current crowding, including skin and proximity effects. An efficient formula is derived to calculate self- and mutual coupling of currents in irregular hexahedrons. Possible approaches for the design of high-Q RF-MEMS spiral inductors are discussed. © 2002 Wiley Periodicals, Inc. Microwave Opt Technol Lett 33: 218–221, 2002; Published online in Wiley InterScience (www.interscience.wiley.com). DOI 10.1002/mop.10280
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