Abstract
The semi-classical model is used to simulate the three-dimensional trajectory and deposition distribution of the chromium atoms in the Gaussian laser standing wave field using the Runge-Kutta method, and then the three-dimensional deposition stripes are also given, besides, the effects of atomic beam divergence, chromatic aberration and spherical aberration on deposition structure are also analyzed.
Highlights
Nanotechnology is one of the fastest growing, most extensively studied, and putting up the most in the territory of science and technology currently, and it is known as the 21st-century science
Nanometrology is involved with the intervals and displacements of the measurement objects within the range of 0.1 nm - 100 nm, the features of objects and their surface morphology, the development of technology and instrument of nano-micro-electronics, micro-machinery and precision measurement, the research on the interaction of probe and measured surface during nano-measurement as well as structures and intervention calibration methods of nano-devices
From the figure we can see that the atomic beam divergence has led to widen the atomic deposition stripes
Summary
Nanotechnology is one of the fastest growing, most extensively studied, and putting up the most in the territory of science and technology currently, and it is known as the 21st-century science. Its purpose is to “research, develop and process those materials, devices and systems whose construction sizes are smaller than 100 nanometers in order to obtain the required functionality and performance [1]”. This definition covers the process of nanofabrication, designs, characteristics and shapes of nanostructures, and measurement and characterization methods of nano-scale. In NIST, McClelland et al once obtained one-dimensional optical gratings of chromium using laser focused atomic deposition technique, the uncertainty of average pitch of focused atomic deposition process manufacturing standard sample was 0.0049 nm [2]. Influence of some factors such as spherical aberration, chromatic aberration, atomic beam divergence on the process of nano-grating is analyzed based on the three-dimensional trajectories of neutral atoms
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