Analysis of corrective characteristics of various polishing methods for mid-frequency errors

Abstract

The theoretical analysis of corrective characteristics of three kinds of polishing methods for mid-frequency errors was studied, which was aimed to confirm the possibility that computer control optical surfacing and computer control active-lap can be replaced by bonnet polishing in the machining process. The first step was to calculate the removal functions of three kinds of polishing technologies and use fast Fourier transform to figure out the frequency spectrum of each method. After that, according to the frequency spectra, curves of cut-off frequencies related to the working ranges of spatial frequencies errors were obtained. It revealed that the affected scope of spatial frequencies is determined by the polishing method, diameter size of polishing tool and shape of removal function. Moreover, only low-frequency errors could be modified and mid-frequency errors could not be corrected or created by computer control active-lap, and computer control optical surfacing can correct part of the mid-frequency errors and low-frequency errors in the polishing process, but at the same time can produce some new mid-frequency errors; as for bonnet polishing, it can be computer control active-lap-like in smoothing which only modified and created the low-frequency errors or computer control optical surfacing-like which corrected and created the mid-frequency errors in local polishing. Otherwise, the efficiency of bonnet polishing is higher than the other two methods. As a result, seen from the point of correction ability of mid-frequency or polishing efficiency, bonnet polishing could replace computer control active-lap and computer control optical surfacing for finishing two polishing stages by only one tool, which is significant to extending the application of bonnet polishing in optical manufacturing.