Analysis of common failure causes in oxide VCSELs

Abstract

Oxide Vertical Cavity Surface Emitting Lasers(VCSELs) are widely used in high-speed optical communication applications. An important specification for VCSELs is field reliability. However, oxide VCSELs are vulnerable to dislocation defect due to the inherent reasons of materials system and structural design. In order to better understand the failure modes and causes of oxide VCSELs, improve the reliability of the chip and reduce the failure rate, we summarize and analyze the most common failure modes, causes observed in oxide VCSELs from five aspects of materials system, structure design, manufactu