Abstract
Grain boundaries of unthinned chemical-vapour-deposited (CVD) diamond films have been examined using high-resolution transmission electron microscopy (TEM) and parallel electron energy loss spectroscopy (EELS) in a scanning transmission electron microscope. EELS analysis shows the presence of amorphous carbon at the grain boundaries and in a surface layer on the CVD diamond film. The amorphous carbon is shown to contain almost complete sp 2 bonding and to be non-hydrogenated. The amorphous carbon at the grain boundary and in a surface layer explains many of the properties and measurements of CVD diamond films.
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