Abstract
A method for extracting transport parameters in short-channel FETs is presented in the context of the Lundstrom model for quasi-ballistic short-channel FETs. The parameters extracted from measured data are unidirectional thermal velocity, critical length, and mean free path at low and high drain biases. The method is based on an analysis of the channel length dependence of apparent mobility and virtual-source (VS) velocity, which are obtained by fitting the VS model to measured data. Data from (100)-oriented undoped-body extremely thin silicon-on-insulator FETs with neutral stress liners are used to validate the method. Since this method does not assume any theoretical knowledge of band structure parameters, it can be applied to short-channel FETs with any geometry, any channel material, and with unknown levels of channel stress.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
