Analysis of anchor and interface losses in piezoelectric MEMS resonators

Abstract

This paper presents a numerical study on anchor and interfacial dissipation in piezoelectric MEMS resonators with in-plane longitudinal-mode vibrations. According to recent proposals, interfacial dissipation is formulated in terms of the stress jump across the interface. A refined dedicated numerical tool is employed both to evaluate anchor losses and to implement the model of interface dissipation. Extensive comparisons with experimental data are performed showing excellent quantitative agreement.