Analysis of Aberrations in Laser-Focused Nanofabrication

Abstract

Based on the semi-classical model,we analyse the motion equation of chromium atoms in the laserstanding wave field under the condition of low intensity light fieldusing fourth-order Adams–Moulton algorithm. The trajectory of theatoms is obtained in the standing wave field by analytical simulation.The image distortion coming from aberrations is analysedand the effects on focal beam features are also discussed. Besidesthese influences, we also discuss the effects on contrast as well asthe feature width of the atomic beam due to laser power and laser beamwaist. The simulation results have shown that source imperfection,especially the transverse velocity spread, plays a critical role inbroadening the feature width. Based on these analyse, we present somesuggestions to minimize these influences.