Analysis of a highly sensitive silicon gyroscope with cantilever beam as vibrating mass

Abstract

In this paper we investigate the behaviour of a silicon-based angular rate sensor which uses a cantilever beam for the vibrating mass. To this end, we examine how the mechanical quality factor influences both the sensitivity and stability of the sensor in the absence of any feedback control. By way of analysis, a simple physical model is presented that describes both the relationship between the tuned device and its sensitivity and, also, how the stability of the device is affected by the various modes of the beam's vibration.