Analysis of a Compact RF MEMS Swith with Multiple Contacts using a Cantilever Beam

Abstract

This paper present a compact RF Micro Electro Mechanical (RF MEMS) Switch with multiple contacts using a cantilever beam structure. The proposed design is used to improve the reliability of the switch by making multiple contacts on a single cantilever beam. By using a multiple contact points it is possible to make a RF contact easier whenever one contact fails. The switching between the various contact points is done by placing two electrodes under the cantilever beam with different biasing voltages. The parasitic capacitances exhibited between the contact points are kept same in order to maintain a good isolation in the OFF state. This also enhances the life time of the switch with low actuation voltage. The design and analysis of the switch is done with intellisuite software. The actuation voltage of the switch is found to be 7. 5V with a displacement of $-0.958 \mu$m and residual stress as 1.409 MPa. The RF analysis shows an isolation of -25dB up to 40 GHz in the off state and insertion loss with less than -0.6dB in the ON state up to 40GHz, the reflection coefficient of the switch is -22dB up to 40GHz