Analysis and Optomechanical Characterisation of a MEMS Micromirror Device

Abstract

Abstract: Advances in our analysis and characterisation of a micro‐electromechanical system (MEMS) micromirror device are presented. The micromirror device, to be used as an integral component of an interferometer, has a characteristic dimension of 510 μm and operates in a dynamic mode with maximum out‐of‐plane displacements in the order of 10 μm at oscillation frequencies of up to 1.3 kHz. Developments are carried out by analytical, computational and experimental methods. Analytical and computational nonlinear geometrical models are developed in order to determine the optimal loading‐displacement operational characteristics of the micromirror. Because of the operational mode of the micromirror, the experimental characterisation of its loading‐displacement transfer function requires utilisation of advanced optical metrology methods. Optoelectronic holographic microscopy (OEHM) methodologies, based on multiple wavelengths being developed to perform such characterisation, are described. The micromirror device is suitable for optical phase measurements and applicable to development of miniaturised optical metrology systems for characterisation of shapes and deformations.