Abstract
A new model is developed to analyze motion accuracy of hydrostatic feed tables and an algorithm is proposed to improve their accuracy. Relationship between film reaction force in a single hydrostatic pad and profile errors of a guide rail is derived at various spatial frequencies by FEM analysis, and it is expressed as a transfer function. This transfer function clarifies so called averaging effects of oil film quantitatively. Furthermore, the transfer function is utilized to estimate error motion of a multiple pad table from measured profiles of its guide rail, and to reversely estimate the profiles from measured error motion. A new method is proposed to improve the motion accuracy by lapping the rail surfaces so as to eliminate the estimated profile error. Its validity is verified analytically and experimentally in the present research, and a straight motion accuracy of 0.07 μm and 1.42 arcsec was achieved over a stroke of 250 mm after the corrective lapping.
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