Abstract

To lower the operating voltage and improve the output performance of piezoelectric actuators, a multilayer monolithic ultrasonic linear piezoelectric actuator was analyzed with the method of finite element analysis (FEA), and a prototype was fabricated and experimentally researched in this study. Experimental results show that the actuator with a multilayer piezoelectric lead zirconate titanate (PZT) structure (size: 30 × 7.5 × 3 mm3, mass: 5.49 g) can output a pulling force of 5.0 N maximum and a linear velocity up to 270 mm/s at the voltage of 100 Vpp (Vpp means the peak-to-peak value of the voltage volts), showing a relatively good velocity controllability at the same time. The temperature rise characteristic of the actuator at various voltages was studied. The results indicate that: the temperature of this actuator rises rapidly but tends to saturate at some value; applying an offsetting voltage or decreasing the amplitude of the voltage would reduce the heat production.

Highlights

  • Ultrasonic piezoelectric actuators (UPAs) are a modern type of micro-actuator which are based on the inverse piezoelectric effect of piezoelectric ceramics and the displacement amplification effect of mechanical resonance [1,2,3,4]

  • The structures can be classified into two categories, one of which is the piezoelectric ceramic chip attached to metal as a driving element [7,11], and the other is a single piezoelectric ceramic as a driving element [6,12]

  • An ultrasonic linear piezoelectric actuator based on multilayer piezoelectric lead zirconate titanate (PZT) was researched

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Summary

Introduction

Ultrasonic piezoelectric actuators (UPAs) are a modern type of micro-actuator which are based on the inverse piezoelectric effect of piezoelectric ceramics and the displacement amplification effect of mechanical resonance [1,2,3,4] They have been widely used for precise positioning and for their excellent properties such as high energy density, short response time, self-lock at power-off state and high displacement resolution [5,6,7]. The structures can be classified into two categories, one of which is the piezoelectric ceramic chip attached to metal as a driving element [7,11], and the other is a single piezoelectric ceramic as a driving element [6,12] The former can be designed into more types of structures since the metal base can be manufactured into different shapes and is less likely to fracture.

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