Abstract

In this paper, we present the resonance frequency spectra features of a composite resonator consisting of a piezoelectric film and a substrate plate. Based on those features, a direct method to characterize the piezoelectric film with two electrodes is presented. By directly using the parallel and series resonant frequency spectra of the HBAR, the electromechanical coupling factor, the density and the elastic constant of the piezoelectric film can be obtained directly. Some problems related to the accuracy of the method, especially the effect of the electrodes, are discussed.

Talk to us

Join us for a 30 min session where you can share your feedback and ask us any queries you have

Schedule a call

Disclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.