Abstract
The analytical closed-form solution for the deflection of a novel beam-shaped shear-modePZT actuator is derived. The actuator can be applied in a microfluidic system. Its activeregion possesses two oppositely poled segments separated by one non-poled segment. Thedeflections in four cases of segment dimensional designs are compared between theanalytical solution and the ANSYS FEM solution. The two solutions show good agreement.And the maximum deflection of the case with a symmetrical design is the largest.Moreover, an experiment for the sample with symmetrical design is performedand the actual shear piezoelectric coefficient is obtained. Based on the actualcoefficient, the experimental result agrees with the analytical solution very well.
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