Abstract

A linear parallel compliant XY-stage for ultra-precision motion is proposed. The prismatic joints of the compliant stage are implemented by three kinds of flexural joints. Among the flexural joints, a modified double compound linear flexural joint has the function of linear motion guide and displacement amplification so that the compliant mechanism has compact structure. The parallel linear compliant mechanism is analyzed, designed, machined by wire electric discharge machining, and then integrated with stack type piezoelectric elements for driving forces and capacitance-type displacement sensors into an ultra-precision stage for 2-DOF linear motions. Experiments demonstrate the characteristics of the ultra-precision stage implemented by the compliant mechanism.

Talk to us

Join us for a 30 min session where you can share your feedback and ask us any queries you have

Schedule a call

Disclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.