Analysis and characterization of microwave plasma generated with rectangular all-dielectric resonators

Abstract

We report on a computational modeling study of small scale plasma discharge formation with rectangular dielectric resonators (DR). An array of rectangular dielectric slabs, separated by a gap of millimeter dimensions is used to provide resonant response when illuminated by an incident wave of 1.26 GHz. A coupled electromagnetic (EM) wave–plasma model is used to describe the breakdown, early response and steady state of the argon discharge. We characterize the plasma generation with respect to the input power, background gas pressure and gap size. It is found that the plasma discharge is generated mainly inside the gaps between the DR at positions that correspond to the antinodes of the resonant enhanced electric field pattern. The enhancement of the electric field inside the gaps is due to a combination of leaking and displacement current radiation from the DR. The plasma is sustained in over-critical densities due to the large skin depth with respect to the gap and plasma size. Electron densities are calculated in the order of for a gas pressure of 10 Torr, while they exceed 1020 in atmospheric conditions. Increase of input power leads to more intense ionization and thus faster plasma formation and results to a more symmetric plasma pattern. For low background gas pressure the discharge is diffusive and extends away from the gap region while in high pressure it is constricted inside the gap. An optimal gap size can be found to provide maximum EM energy transfer to the plasma. This fact demonstrates that the gap size dictates to a certain extent the resonant frequency and the Q-factor of the dielectric array and the breakdown fields can not be determined in a straight-forward way but they are functions of the resonators geometry and incident field frequency.