Abstract

Novel SiON glasses obtained by melting mixtures of crystalline α-SiO2 and α-Si3N4 were investigated by means of X-ray photoelectron spectroscopy (XPS). The incorporation of nitrogen into the SiO2 network was recently proved by 29Si-MAS-NMR (magic-angle spinning nuclear magnetic resonance) and Si K-XANES (X-ray absorption near edge structure). The Si 2p XPS and the Si KLL XAES (X-ray excited Auger electron spectroscopy) studies of the SiON glasses confirm the formation of mixed structural units (SiOxN4-x) by the presence of an additional spectral component energetically located between SiO2- and Si3N4-like signals. The N 1s and O 1s XPS spectra support the conclusion about the incorporation of nitrogen into the SiO2 network.

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