Abstract
Through the use of XPS and controlled Ar+ etching, the surface composition and oxide species of tantalum oxides (TaO x ), which were electrodeposited on glassy carbon electrodes by cyclic voltammetric and constant-potential electrolyses, are quantified along the depth profile. Electrodeposition exhibits efficacy in depositing TaO x with a distribution of various TaO x : TaO, TaO2, and Ta2O5. The distribution gradient from the outer surface of TaO x is such that Ta2O5 > TaO2 > TaO. TaO is found to be the dominant species in the underlying layer of TaO x . Such a unique structure of the electrode surface is analogous to that of nanoparticles with a core–shell structure, with the core being suboxides and the surface being that of the saturated pentoxide, Ta2O5. The electrochemically induced nonhydrolytic condensation route is proposed to be capable of producing TaO x with a distribution gradient of Ta2O5, TaO2, and TaO in the depth direction.
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