Abstract
A fine x-ray beam, less than 10 μm in diameter, was produced using a small x-ray tube and an x-ray guide tube (XGT) with a parabolic inner contour. The beam was directed vertically on to the sample, which was mounted on an x–y scanning stage. The transmitted x-rays were measured with an NaI(Tl) scintillation detector and the fluorescent, back-scattered and diffracted x-rays were simultaneously detected by an hp-Si detector. The scanning images of transmitted, fluorescent and other x-rays were obtained by accumulating the detected signals. A scanning image of the lower layer of a four-layer, printed-circuit board was obtained by subtracting the fluorescent x-ray image from the x-ray transmitted image. Using diffracted x-rays, distribution images of crystal grains could be made. The method for fabricating the XGT is described and examples of applications of a desk-top scanning x-ray analytical microscope are shown. © 1997 John Wiley & Sons, Ltd.
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