Abstract
An X-ray grazing incidence phase multilayer grating, representing a thin grating placed on a multilayer mirror, is proposed. A high efficiency of grating diffraction can be obtained by the possibility of changing the phase shift of the wave diffracted from the multilayer under the Bragg and total external reflection conditions. A grazing incidence phase multilayer grating consisting of Pt grating stripes on a Ni/C multilayer and optimized for the hard X-ray range was fabricated. Its diffraction properties were studied at photon energies of 7 and 8 keV. The obtained maximum value of the diffraction efficiency of the +1 grating order was 9% at 7 keV and 6.5% at 8 keV. The data obtained are in a rather good accordance with the theory.
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