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Abstract
Epitaxial thin films of lithium tantalate have been r.f. diode sputtered onto (0001) single-crystal sapphire substrates. X-ray diffraction results show that, as the Li/(Li + Ta) ratio decreased below 0.5, the LiTaO 3 (LTO type) c-axis lattice constant increased. An additional lithium tantalate phase is observed to coexist with the LTO-type phase at a Li/(Li + Ta) ratio of around 0.4. When the Li/(Li + Ta) ratio becomes close to 0.25, this additional phase is the only phase observed in the sputter-deposited thin film. Tilt-angle X-ray diffraction results confirmed that this additional phase is ilmenite-type (IL type) Li( 1 − x) TaO 3.
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