An unconditionally stable three level finite difference scheme for solving parabolic two‐step micro heat transport equations in a three‐dimensional double‐layered thin film

Abstract

AbstractHeat transport at the microscale is of vital importance in microtechnology applications. The heat transport equations are parabolic two‐step equations, which are different from the traditional heat diffusion equation. In this study, we develop a three‐level finite difference scheme for solving the micro heat transport equations in a three‐dimensional double‐layered thin film. It is shown by the discrete energy method that the scheme is unconditionally stable. Numerical results for thermal analysis of a gold layer on a chromium padding layer are obtained. Copyright © 2003 John Wiley & Sons, Ltd.