An ultrathin integrated nanoelectromechanical transducer based on hafnium zirconium oxide

Abstract

The monolithic integration of electromechanical transduction at the nanoscale with advanced CMOS is among the most important challenges of semiconductor electronic systems to leverage the multi-domain sensing, actuation, and resonance properties of nano-mechanical systems. Here we report on the demonstration of vibrating devices enabled by atomically engineered ferroelectric Hf0.5Zr0.5O2 thin films with a variety of mechanical resonance modes with frequencies (f0) between 340kHz - 13GHz and frequency-quality (Q) factor products (f0 x Q) up to 3.97 x 10^12. Experiments based on electrical and optical probing elucidate and quantify the role of the electrostrictive effect in the electromechanical transduction behavior of the Hf0.5Zr0.5O2 film. We further demonstrate the role of nonlinear electromechanical scattering on the operation of Hf0.5Zr0.5O2 transduced resonators. This investigation also highlights the potential of atomically engineered ferroelectric Hf0.5Zr0.5O2 transducers for new classes of CMOS-monolithic linear and nonlinear nanomechanical resonators in centimeter- and millimeter-wave frequencies.