Abstract

AlGaN 基深紫外(Deep ultraviolet,DUVï¼‰å‘å ‰äºŒæžç®¡ï¼ˆLight⁃emitting diode,LEDï¼‰å¯ç”¨äºŽæ€èŒã€æ°´ä½“å‡€åŒ–ã€å ‰ç–—ã€å›ºåŒ–ã€ä¼ æ„Ÿå’Œéžè§†è·é€šä¿¡ç­‰åœºåˆï¼Œåœ¨ç”Ÿç‰©ã€çŽ¯å¢ƒã€å·¥ä¸šã€åŒ»ç–—å’Œå†›äº‹ç­‰é¢†åŸŸå ·æœ‰å¹¿é˜”çš„åº”ç”¨å‰æ™¯ã€‚é’ˆå¯¹çŽ°é˜¶æ®µ DUV LED å¤–é‡å­æ•ˆçŽ‡è¾ƒä½Žçš„é—®é¢˜ï¼Œæœ¬æ–‡æå‡ºäº†ä¸€ç§è¶ è–„åž‚ç›´ç»“æž„çš„ DUV LED æ–¹æ¡ˆã€‚è¯¥æ–¹æ¡ˆåŸºäºŽè“å®çŸ³â€ç¡ æ™¶åœ†é”®åˆå’Œç‰©ç†å‡è–„å·¥è‰ºå®žçŽ°äº†é«˜è´¨é‡ DUV LED å¤–å»¶å±‚ä»Žè“å®çŸ³è¡¬åº•åˆ°é«˜å¯¼çƒ­ç¡ åŸºæ¿çš„è½¬ç§»ï¼Œå¹¶é‡‡ç”¨è½¬ç§»åŽäºšå¾®ç±³åŽšåº¦çš„è¶ è–„å¤–å»¶å±‚åˆ¶å¤‡å‡ºåž‚ç›´ç»“æž„çš„ AlGaN DUV LEDã€‚å™¨ä»¶çš„å‡ºå ‰é¢åœ¨å‡è–„å·¥è‰ºåŽæ— éœ€ç‰¹æ®Šçš„åŒ–å­¦å¤„ç†ä¾¿å¯å®žçŽ°çº³ç±³çº§çš„ç²—åŒ–ï¼Œé åˆè¶ è–„å¤–å»¶å±‚ç»“æž„å ·å¤‡æ˜¾è‘—çš„å¤±è°å¾®è ”æ•ˆåº”ï¼Œæœ‰åŠ©äºŽç ´åé«˜é˜¶æ³¢å¯¼æ¨¡å¼ï¼Œä»Žè€Œå¢žåŠ TM æ³¢çš„å‡ºå ‰å¹¶æå‡å™¨ä»¶çš„å‡ºå ‰æ•ˆçŽ‡ã€‚æµ‹è¯•è¡¨æ˜Žï¼Œè½¬ç§»åŽçš„å¤–å»¶å±‚åŽšåº¦çº¦ä¸º 710 nm,制备出的 DUV LED å‘å ‰å ‰è°±å³°å€¼æ³¢é•¿çº¦ä¸º 271 nm。该垂直结构 DUV LED 制备方案为实现高效 DUV å ‰æºæä¾›äº†å¯è¡Œè·¯å¾„ã€‚

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