Abstract
In biomedical field, there is a need for improving medical technologies to provide accurate diagnosis to patients. The objective is to develop a minimally invasive, implantable, pressure sensing system that continuously monitors physiological changes in real-time. For implementing, three different shapes of MEMS capacitive pressure sensor having same area of diaphragm 0.126 mm² is designed and simulated for blood pressure measurement. The various shapes which are taken are circular, square and rectangular. COMSOL multiphysics tool is used for simulation. For these shapes capacitance and deflection variation of membrane with applied pressure is studied. Result shows a sensitivity of 0.255 aF/kPa, 0.125 aF/kPa and 0.09 aF/kPa for circular, square and rectangular shape, respectively. So, circular MEMS capacitor provides the greater sensitivity than all other shapes and also provides greater deflection of diaphragm due to applied pressure of 40 kPa. Also deflection is more in circular diaphragm capacitive pressure sensor.
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