Abstract
This paper presents a piezoresistive pressure sensor that exhibits extremely low thermal sensitivity drift across a broad range of temperatures, which integrates a passive resistor/thermistor network for compensation. Standard microfabrication processes were conducted to fabricate the sensor chip. From the experimental results, the proposed sensor demonstrated an extremely low thermal sensitivity drift of 0.01% FS/°C within temperature range of -55 °C to 85 °C, which is a significant improvement compared with the sensor with no temperature compensation (0.17% FS/°C) and the sensor with conventional temperature compensation (0.09% FS/°C). The compensation method developed in this study has the potential to serve as a facilitating instrument in pressure measurements with large temperature variations.
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