An overview of ionization gauges with carbon nanotube cathodes

Abstract

Carbon nanotubes (CNTs) as ideal electron emitters have been widely used in a variety of electronic devices, including the x-ray tube, vacuum microwave tubes, flat panel displays, electron microscopes, ionization gauges, etc. In this paper, we summarize the current status of research on a variety of ionization gauges with CNT cathodes and discuss the advantages as well as the existing problems of the novel ionization gauge. The CNT emitter-based ionization gauges have proved highly effective at ultra high and extra high vacuum measurements. This review also provides some suggestions to improve gauge performance in future work.