Abstract

Demand for High NA objective lenses with diffraction limited image quality is growing. This demand translates in design more complex optical system with many optical components. In order to optimize the most favorable arrangement of optical components new design methodology based on functional separation lens group in high numerical aperture (NA) objective was developed. For this purpose, all lens components were divided on the three-lens group: front group, middle group and output lens group. The front lens group includes front lens (thick meniscus for dry type of objective or thick plano-convex lens for immersion objective) and several aplanatic shape meniscus lenses. The middle lens group consists of several cemented lens components (doublets or triplets) and output lens group includes “Double Gauss” lens system or combination of cemented doublet with one or two singlet lenses. The total number of lenses in such types of optical system can reach 15-16 or even more. Design an optimal composition (optical components arrangement) for high numerical aperture objective lens will be discussed. Quantitative related parameter for optimal objective lens component’s structure will be proposed.

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