Abstract
An optical wireless bistable micro-actuator is presented in this paper. The bistable mechanism is based on antagonistic pre-shaped double beams, which have the merits of simple pre-load operation and symmetrical output force. The bistable micro-actuator was fabricated with deep reactive ion etching (DRIE) technique using silicon on insulator (SOI) wafer. The bistable beam has a thickness of 25 µm and a depth of 400 µm. The stroke of the bistable micro-actuator is 300 µm. An 8 µm thick compressive SiO 2 layer is deposited on one side of the strip shaped (0.1×1×3 mm) shape memory alloy (SMA) active element, acting as the biasing spring. The SiO 2 layer created a two way memory effect and eliminated the load effect of SMA element. Stroke of SMA element is tested. The wireless actuation was realized by laser heated SMA active element.
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