Abstract
We present an optical straightness measurement sensor applicable to the watt balance experiment. Key parts of the sensor are a cube-corner prism and a right angle reflector having a sharp edge. Beam reflected from the cube-corner prism is split into two opposite directions by the right angle reflector, and collected by photo detectors connected to a lock-in amplifier. Straightness error is measured by monitoring the normalized intensity difference of the two lock-in signals. We describe in detail about the implemented sensor and evaluated performance on its resolution, sensitivity, and nonlinearity comparing with a laser interferometer. Straightness measurement result of a translation stage agreed with that obtained by a laser interferometer within ±60nm over the measurement range of 40mm.
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