Abstract
Automated optical inspection is a very important technique. For this reason, this study proposes an optical non-contact slanting surface measuring system. The essential features of the measurement system are obtained through simulations using the optical design software Zemax. The actual propagation of laser beams within the measurement system is traced by using a homogeneous transformation matrix (HTM), the skew-ray tracing method, and a first-order Taylor series expansion. Additionally, a complete mathematical model that describes the variations in light spots on photoelectric sensors and the corresponding changes in the sample orientation and distance was established. Finally, a laboratory prototype system was constructed on an optical bench to verify experimentally the proposed system. This measurement system can simultaneously detect the slanting angles (x, z) in the x and z directions of the sample and the distance (y) between the biconvex lens and the flat sample surface.
Highlights
Among the measurement methods used in present day production lines, the non-contacting measurement technique is widely applied [1,2]
For the laser positioning measurement technique, our research team has proposed a series of innovative system frameworks and combined them with optical diffusers to suppress the geometrical fluctuations of the laser beam and to achieve long-range and high-accuracy measurements [5,6,7]
The laser beam is directed offthis the study opticalisaxis by a small distance measurement (s) and is system with a simple architecture, straightforward assembly, and lower manufacturing cost that can reflected by BS2 to become incident on the sample through the biconvex lens
Summary
Among the measurement methods used in present day production lines, the non-contacting measurement technique is widely applied [1,2]. The laser beam is directed offthis the study opticalisaxis by a small distance measurement (s) and is system with a simple architecture, straightforward assembly, and lower manufacturing cost that can reflected by BS2 to become incident on the sample through the biconvex lens. The information of the laser spots on CCD will depend not onlyand on two the charge-coupled sample surface the light1.source, two beam splitters (BS) accompanied by two biconvex lenses, orientation but that are on the change the distancesensors betweentothe biconvex lens and the sample. The information of the angles laser spots on will depend on the surface orientation but spot In this regard, a detailed mathematical derivation will be presented in Section on the change in the distance between the biconvex lens and the sample
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