Abstract
Abstract In this paper, a Fabry-Perot pressure sensor using a corrugated diaphragm and angle polished fiber is proposed. A SU-8 structure using two step of lithography is formed to fix the polished fiber, which helps control the cavity length precisely. The fabrication process is described. The characteristics of both pressure and temperature are tested. Also the temperature compensation is realized. Experimental results show that the sensor has high sensitivity and good linearity over the pressure range of 0–0.1 MPa. The sensitivity (change in cavity/loaded pressure) is 705.64 μm/MPa.
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