Abstract
The composition and evolution of the plume generated by 532 nm laser ablation of a Ta 2O 5 target in ambient O 2 has been studied by optical emission spectroscopy. Ionic and neutral atomic Ta as well as TaO molecules are observed in the plume. Two components of TaO emission are observed by spatially and temporally resolved emission spectroscopy. The delay time and intensity of TaO emission are measured as a function of laser fluence, distance from the target surface and ambient O 2 pressure. The results suggest that the interaction between the laser radiation and the target as well as the reactions of the ablated species with oxygen play an important role in the growth of the Ta 2O 5 film.
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